Singulated MEMS

MEMS Test and Calibration Equipment for Package Test

  • Key Features

    • easy docking and undocking of the MEMS modules to the standard test handler
    • test in the complete tri-temp range for ambient, hot and cold
    • easily convertible to other packages
    • downscaled stand-alone engineering set-up available
    • global support by experienced Xcerra staff
  • Various MEMS Stimuli available

    • up to 6 DOFs
    • high g accelerometer
    • gyroscopes with constant yaw rate
    • gyroscopes with sinusoidal stimulus
    • pressure sensor
    • electromagnetic applications
    • 3D electromagnetic compass test